Friday, Nov. 16, 2007
1:30 PM, 8500 Boelter Hall

Surface Engineering of MEMS

Roya Maboudian
Department of Chemical Engineering
University of California at Berkeley

Abstract:
Given the dimension of most microelectromechanical systems, gravity and other body forces are negligible.  In contrast, interfacial forces dominate due to their large surface-to-volume ratios.  As a consequence, adhesion, friction, and wear (collectively termed tribology) are prevalent problems in many MEMS devices.  Viewed differently, MEMS technology provides us with an opportunity to study tribology in the mesoscopic length scale.

This presentation will discuss the use of several microinstruments in conjunction with various surface characterization techniques to gain insights into the origin of these interactions, and to manipulate them by utilizing various surface modifications.