Master’s Degree in Semiconductor Manufacturing Requirements

 Student Affairs Officer

Lesly Navas,

Phone: (310) 825-1203

CBE Faculty Graduate Advisor

Jane Chang,

Areas of Study

Specialization in semiconductor
. The specialization requires that the student have advanced
knowledge of processing semiconductor devices on the nanoscale. This knowledge
is assessed in a comprehensive examination.


Foreign Language Requirement



Course Requirements

Specialization in semiconductor manufacturing: Students in this specialization are required to complete 10 courses (44 units) with a minimum 3.0 grade-point average overall and in graduate courses. A minimum of five (20 units) 200-series courses are required.

Students  are required to take:

Chemical Engineering 104C and 104CL (Semiconductor Processing and Laboratory)

Chemical Engineering 270 (Principles of Reaction and Transport Phenomena)*

Chemical Engineering 270R (Advanced Research in Semiconductor Manufacturing)

Electrical Engineering 123A (Fundamentals of Solid-State I)

Materials Science and Engineering 121 (Materials Science of Semiconductors)

*Chemical Engineering 220 (Advanced Mass Transfer) is a pre-approved substitution for Chemical Engineering 270. 

In addition, students must select two elective courses from the department’s list of electives, and two elective courses from elective offerings from the Departments of Electrical Engineering and Materials Science and Engineering, with a minimum of two of these in the 200 series. Approved elective courses include: Chemical Engineering C216, C219, C214, C218, 223, C240; Electrical Engineering 124, 221A, 221B, 223, 224; Materials Science and Engineering 210 and 223.

Students in the specialization of semiconductor manufacturing who have been undergraduates or graduates at UCLA and who have already taken some of the required courses may substitute electives for these courses. However, no courses taken while not enrolled in the specialization may be counted toward the 10-course requirement for the degree. A program of study encompassing the course requirements must be submitted to the graduate adviser for approval before the end of the student’s first quarter in residence.

All master’s degree candidates are required to enroll in Chemical Engineering 299 during each quarter of residence.

A program of study encompassing the course
requirements must be submitted to the research adviser for approval before the
end of the student’s first quarter in residence.

A program of study which encompasses these requirements must be submitted to the departmental Student Affairs Office for approval before the end of the student’s second quarter of residence.

Undergraduate Courses. No lower division courses may be applied toward graduate degrees. In addition, the following upper division courses are not applicable toward graduate degrees: Chemical Engineering 102A, 199; Civil Engineering 106A, 108, 199; Computer Science M152A, M152B, 199; Electrical Engineering 100, 101, 102, 103, 110L,M116L,199; Materials Science and Engineering 110, 120, 130, 131, 131L, 132, 150, 160,161L, 199; Mechanical and Aerospace Engineering 102, 103, 105A, 105D, 199.


Teaching Experience

Not required.


Field Experience

Specialization in semiconductor manufacturing. Students are required to take Chemical Engineering 270R, a directed research course, in the field, working at an industrial semiconductor fabrication facility. The proposed research must be approved by the graduate adviser for semiconductor manufacturing and the industrial sponsor of the research.


Comprehensive Examination Plan

This plan is only for students in the specialization in semiconductor manufacturing. Students take Chemical Engineering 597A to prepare for a comprehensive written examination. The examination tests for knowledge of the engineering principles of semiconductor manufacturing. In case of failure, the examination may be repeated once with the consent of the graduate adviser for the specialization. Second failure of the examination leads to a recommendation to the Graduate Division for termination of graduate study.



Specialization in semiconductor manufacturing. Students in this specialization must complete the degree in two years (six quarters). The program may be completed in one calendar year (three quarters and a summer session) by enrolling in three courses per quarter and for one summer session. Students who are enrolled less than full-time must complete the degree in three years (nine quarters).

MS Timeline

MS Course Study Plan

Graduate Handbook